JPH03109100U - - Google Patents

Info

Publication number
JPH03109100U
JPH03109100U JP1459590U JP1459590U JPH03109100U JP H03109100 U JPH03109100 U JP H03109100U JP 1459590 U JP1459590 U JP 1459590U JP 1459590 U JP1459590 U JP 1459590U JP H03109100 U JPH03109100 U JP H03109100U
Authority
JP
Japan
Prior art keywords
electron beam
irradiation
generation section
window portion
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1459590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1459590U priority Critical patent/JPH03109100U/ja
Publication of JPH03109100U publication Critical patent/JPH03109100U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
JP1459590U 1990-02-16 1990-02-16 Pending JPH03109100U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1459590U JPH03109100U (en]) 1990-02-16 1990-02-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1459590U JPH03109100U (en]) 1990-02-16 1990-02-16

Publications (1)

Publication Number Publication Date
JPH03109100U true JPH03109100U (en]) 1991-11-08

Family

ID=31517947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1459590U Pending JPH03109100U (en]) 1990-02-16 1990-02-16

Country Status (1)

Country Link
JP (1) JPH03109100U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007125119A (ja) * 2005-11-01 2007-05-24 Mitsubishi Heavy Ind Ltd 電子線殺菌装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007125119A (ja) * 2005-11-01 2007-05-24 Mitsubishi Heavy Ind Ltd 電子線殺菌装置

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